Please use this identifier to cite or link to this item:
http://dx.doi.org/10.25673/4460Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.referee | Burte, Edmund P. | - |
| dc.contributor.referee | Edelmann, Frank T. | - |
| dc.contributor.author | Amusan, Akinwumi Abimbola | - |
| dc.date.accessioned | 2018-09-24T18:12:46Z | - |
| dc.date.available | 2018-09-24T18:12:46Z | - |
| dc.date.issued | 2016 | - |
| dc.identifier.uri | https://opendata.uni-halle.de//handle/1981185920/12174 | - |
| dc.identifier.uri | http://dx.doi.org/10.25673/4460 | - |
| dc.description.statementofresponsibility | von M. Sc.Akinwumi Abimbola Amusan | - |
| dc.format.extent | 1 Online-Ressource (PDF-Datei: xviii, 170 Blätter, 28,64 MB) | - |
| dc.language.iso | eng | - |
| dc.publisher | Otto von Guericke University Library, Magdeburg, Germany | - |
| dc.subject.ddc | 621 | - |
| dc.title | Plasma-assisted atomic layer deposition for microelectronics applications | - |
| dcterms.type | Hochschulschrift | - |
| dc.type | PhDThesis | - |
| dc.identifier.urn | urn:nbn:de:gbv:ma9:1-8379 | - |
| local.publisher.universityOrInstitution | Otto-von-Guericke-Universität Magdeburg | - |
| local.openaccess | true | - |
| Appears in Collections: | Fakultät für Elektrotechnik und Informationstechnik | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Akinwumi_Amusan_PhD_thesis.pdf | 29.32 MB | Adobe PDF |  View/Open |